UE Adhesion, friction and direct bonding

Goal: Nanomechanics is an important part of applied nanotechnology, This course will provide a working knowledge of nano-mechanics and nano-tribology emphasizing the role of surfaces,  interfaces, defects, roughness, and quantum effects. Nano-mechanical measurements techniques and applications in micro-electronic technologies and nano-manufactoring will be developped.

I. Overview and preliminaries.
     Surface interactions ; Van der Waals long range forces ; Derjaguin approximation, measuring surfaces forces  SFA AFM.

II. Mechanics of solid contacts.
     Single contact: Herz contact ; mechanics of adhesive contacts.
     Statistics of contacts: Greenwood-Williamson model ; elasto-plastic contact 

III. Friction an lubrication
     Amonton's law and Coulomb friction ;  Tabor 's model of friction. Static and dynamic friction ; stick-slip ; Rice and Ruina law's of friction.  Lubrication regimes, Reynolds equation, squeeze film lubrication. Exercice class.

IV. Applications in micro-electronics 
     MEMS & NEMS applications                                                                                            Direct bonding, wetting ;  bonding wave dynamics
     Mechanics of fracture ; smartcut process