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Degrees incorporating this pedagocial element :
Description
Goal: Nanomechanics is an important part of applied nanotechnology, This course will provide a working knowledge of nano-mechanics and nano-tribology emphasizing the role of surfaces, interfaces, defects, roughness, and quantum effects. Nano-mechanical measurements techniques and applications in micro-electronic technologies and nano-manufactoring will be developped.
I. Overview and preliminaries.
Surface topography ; roughness models and parameters ; measurements and characterization.
Surface interactions ; Van der Waals long range forces ; Derjaguin approximation, measuring surfaces forces SFA AFM.
II. Mechanics of solid contacts.
Single contact: Herz contact ; mechanics of adhesive contacts.
Statistics of contacts: Greenwood-Williamson model ; elasto-plastic contact
III. Beams, plates, and MEMS applications
Elastic energy ; equilibrium and dynamic equations ; competition with adhesion ; applications to NEMS. Exercice class (AFM cantilever or NEMS oscillators).
IV. Surface energy of solids
Measurement methods ; hysteresis and aging ; stress corrosion. Exercice class.
V. Friction an lubrication
Amonton's law and Coulomb friction ; Tabor 's model of friction. Static and dynamic friction ; stick-slip ; Rice and Ruina law's of friction. Lubrication regimes, Reynolds equation, squeeze film lubrication. Exercice class.
VI. Applications in micro-electronics
Direct bonding, wetting ; bonding wave dynamics
Mechanics of fracture ; smartcut process
Courses offered by :
In brief
Period : Semestre 9Credits : 3
Number of hours
- Cours magistral - Travaux dirigés : 21h
Language(s) : English
