UE Adhesion, friction and direct bonding

Diplômes intégrant cet élément pédagogique :


Goal: Nanomechanics is an important part of applied nanotechnology, This course will provide a working knowledge of nano-mechanics and nano-tribology emphasizing the role of surfaces,  interfaces, defects, roughness, and quantum effects. Nano-mechanical measurements techniques and applications in micro-electronic technologies and nano-manufactoring will be developped.

I. Overview and preliminaries.
     Surface topography ; roughness models and parameters ; measurements and characterization.
     Surface interactions ; Van der Waals long range forces ; Derjaguin approximation, measuring surfaces forces  SFA AFM.

II. Mechanics of solid contacts.
     Single contact: Herz contact ; mechanics of adhesive contacts.
     Statistics of contacts: Greenwood-Williamson model ; elasto-plastic contact 

III. Beams, plates, and MEMS applications 
     Elastic energy ; equilibrium and dynamic equations ; competition with adhesion ; applications to NEMS. Exercice class (AFM cantilever or NEMS oscillators).

IV. Surface energy of solid
     Measurement methods ; hysteresis and aging ; stress corrosion. Exercice class.

V. Friction an lubrication
Amonton's law and Coulomb friction ;  Tabor 's model of friction. Static and dynamic friction ; stick-slip ; Rice and Ruina law's of friction.  Lubrication regimes, Reynolds equation, squeeze film lubrication. Exercice class.

VI. Applications in micro-electronic
Direct bonding, wetting ;  bonding wave dynamics
Mechanics of fracture ; smartcut process

Informations complémentaires

Langue(s) : Anglais